Selective area heteroepitaxy of low dislocation density antiphase boundary free GaAs microridges on flat-bottom (001) Si for integrated silicon photonics

نویسندگان

چکیده

Integrating III–V gain elements in the silicon photonics platform via selective area heteroepitaxy (SAH) would enable large-scale and low-cost photonic integrated circuits. Here, we demonstrate antiphase boundary (APB)-free gallium arsenide (GaAs) microridges selectively grown on flat-bottom (001) (Si) inside a recess. This approach eliminates need for etching patterned Si to form trapezoid or v-groove shapes, often leveraged eliminating APBs. A low surface dislocation density of 8.5 × 106 cm−2 was achieved 15-μm-wide GaAs microridges, quantified by electron channeling contrast imaging. The avoidance APBs is primarily due their self-annihilation, influenced sufficiently temperature nucleation subsequent higher buffer overgrowth. Dislocation filtering approaches, namely, thermal cycle annealing strained-layer superlattices, have been applied effectively reduce density. SAH trapezoidal-shaped pockets also reported illustrate differing growth conditions (111) microplanes.

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2021

ISSN: ['1520-8842', '0003-6951', '1077-3118']

DOI: https://doi.org/10.1063/5.0043027